10 treff

microelectromechanical systems design and construction
Microsystem design
Stephen D. Senturia
Bok Engelsk 2001 · Vis mer
Mechanical microsensors
M. Elwenspoek, R. Wiergerink
Bok Engelsk 2001 · Vis mer
CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications
D. Lange, O. Brand, H. Baltes
Bok Engelsk 2002 · Vis mer
The MEMS handbook MEMS : design and fabrication

Bok Engelsk 2006 · Vis mer
Scaling issues and design of MEMS
Salvatore Baglio, Salvatore Castorina, Ni...
Bok Engelsk 2007 · Vis mer
Microfabrication and nanomanufacturing
edited by Mark J. Jackson
Bok Engelsk 2006 · Vis mer
Mechanical design of microresonators : modeling and applications
Nicolae Lobontiu
Bok Engelsk 2006 · Vis mer
Design and development of MEMS based guided beam type piezoelectric energy harvester
Shanky Saxena, Ritu Sharma, B.D. Pant.
Bok Engelsk 2021 · Vis mer
Microstereolithography and other fabrication techniques for 3D MEMS
Vijay K. Varadan, Xiaoning Jiang and Vasu...
Bok Engelsk 2001 · Vis mer
Semiconductor wafer bonding: science, technology, and applications V : proceedings of the international symposia
Electronics Division. Ed.: Charles E. Hun...
Bok Engelsk 2001 · Vis mer