CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications

D. Lange, O. Brand, H. Baltes
Bok · Engelsk · 2002

Utgitt	Berlin : Springer , c2002
Omfang	VIII, 142 s. : ill.
Emner	Atomic force microscopy - Equipment and supplies Design and construction Gas detectors - Design and construction Levers - Design and construction Metal oxide semiconductors, Complementary - Design and construction Vis mer... Microelectromechanical systems - Design and construction MEMS Sensorer
ISBN	3540431438