Microstereolithography and other fabrication techniques for 3D MEMS
Vijay K. Varadan, Xiaoning Jiang and Vasundara V. Varadan
Bok Engelsk 2001
| Utgitt | Chichester : Wiley , c2001
|
|---|---|
| Omfang | XIII, 260 s. : ill.
|
| Emner | Microelectromechanical systems - Design and construction
Microlithography Three-dimensional display systems Mikroelektronikk - Fotolitografi mikroelektronikk fotolitografi mems mikroteknologi |
| ISBN | 047152185X
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