Mechanical design of microresonators : modeling and applications

Nicolae Lobontiu
Bok · Engelsk · 2006

Utgitt	New York : McGraw-Hill , c2006
Omfang	XIII, 342 s. : ill.
Emner	Detectors - Design and construction Electric resonators - Design and construction Microelectromechanical systems - Design and construction Vibrators - Design and construction MEMS
ISBN	0071455388