Mechanical microsensors

M. Elwenspoek, R. Wiergerink
Bok · Engelsk · 2001

Utgitt	Berlin : Springer , c2001
Omfang	X, 295 s. : ill.
Emner	Detectors - Design and construction Microelectromechanical systems - Design and construction Micromachining Silicon Transducers
ISBN	3540675825