Microfabrication and nanomanufacturing

edited by Mark J. Jackson
Bok · Engelsk · 2006

Utgitt	Boca Raton, Fla. : CRC/Taylor & Francis , 2006
Omfang	401 s. : ill.
Emner	Integrated circuits - Design and construction Microelectromechanical systems - Design and construction Microelectronics MEMS
ISBN	0824724313. - 9780824724313