Plasma deposition of amorphous silicon-based materials
edited by Giovanni Bruno, Pio Capezzuto, Arun Madan
Bok Engelsk 1995
| Utgitt | Boston : Academic Press , c1995
|
|---|---|
| Omfang | XI, 324 s. : ill.
|
| Emner | Amorphous semiconductors - Design and construction
Plasma-enhanced chemical vapor deposition Silicon alloys plasma deponering halvledere |
| Dewey | |
| ISBN | 012137940X
|
