Handbook of silicon wafer cleaning technology

edited by Karen Reinhardt, Werner Kern.
Bok · Engelsk · 2018 · Electronic books.

Medvirkende	Kern, Werner, (editor.) Reinhardt, Karen, (editor.)
Omfang	1 online resource (775 pages)
Utgave	Third edition.
Emner	Silicon-on-insulator technology.
Sjanger	Electronic books.
Dewey	621.38152
ISBN	0-323-51084-1. - 0-323-51085-X