A lithographer's guide to patterning CMOS devices with directed self-assembly

by Douglas J. Guerrero.
Bok · Engelsk · 2020

Omfang	1 online resource (v, 30 pages)
Emner	Integrated circuits - Design and construction. Metal oxide semiconductors, Complementary. Microlithography. Self-assembly (Chemistry)
ISBN	1-5106-3701-X