Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing : [held at the Electrochemical Society Fall Meeting in Phoenix, Arizona, October 14 - 18, 1992 (i.e. 1991!)]
ed. by Jerzy Ruzyllo ...
Bok Engelsk 1992 International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
| Utgitt | Pennington, NJ : Electrochemical Society , 1992
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| Omfang | XI, 502 S : Ill
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| Opplysninger | Sponsored jointly by the Electronics and Dielectric Science and Technology Divisions. - Literaturangaben
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| Dewey | |
| ISBN | 1566770122
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