PVD for microelectronics : sputter deposition applied to semiconductor manufacturing
Ronald A. Powell; Stephen M. Rossnagel
Bok Engelsk 1998
| Medvirkende | |
|---|---|
| Omfang | XII, 419 S : Ill., graph. Darst
|
| Opplysninger | Literaturangaben. - Includes index
|
| Emner | |
| Dewey | |
| ISBN | 012533026X
|
