Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing : [contains the papers presented at the Fourth International Symposium on Wafer Cleaning Technology in Semiconductor Device Manufacturing ... held during the Fall Electrochemical Society Meeting in Chicago, Illinois, October 1995]
Electronics Division, The Electronichemical Society. Ed. by Richard E. Novak ...
Bok Engelsk 1996
| Utgitt | Pennington, NJ : Electrochemical Society , 1996
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|---|---|
| Omfang | XII, 626 S : ill
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| Opplysninger | Electronics Division
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| Emner | |
| Dewey | |
| ISBN | 1566771153
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