Crystalline defects and contamination : their impact and control in device manufacturing ; proceedings of the Satellite Symposium to ESSDER 93 Grenoble/France [presented at the Symposium on "Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing" held in Grenoble, France, on September 17th, 1993 ; this One-day Symposium was organized in conjunction with ESSDERC 93, 23rd European Solid State Divice Research Confernce from September 13th to 16th, 1993 in Grenoble, France]
Electronics Division. ed. by Bernd O. Kolbesen ..
Bok Engelsk 1993
| Utgitt | Pennington, NJ : Electrochemical Society , 1993
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|---|---|
| Omfang | IX, 283 S : Ill., garph. Darst
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| Opplysninger | Includes bibliographical references and indexes
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| Emner | |
| Dewey | |
| ISBN | 1566770599
|
