Preparation and electrical characterization of silicon structures formed by wafer bonding
Stefan Bengtsson
Bok Engelsk 1991
| Utgitt | Göteborg : Department of Solid State Electronics, Chalmers University of Technology , 1991
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|---|---|
| Omfang | 1 b. (flere pag.) : ill.
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| Opplysninger | Avh. (fil. dr.) - Chalmers tekniska högskola, 1991.
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| Emner | |
| ISBN | 917032655X
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