Structural characterization of SiC and Si/SiC layers grown on Si(001) substrates by vapor deposition
Lars-Olof Björketun
Bok Engelsk 1996
| Utgitt | Linköping : Linköping University, Department of Physics and Measurement Technology , 1996
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| Omfang | IV, 68 s. : ill.
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| Opplysninger | Avhandling (tekn. lic.) - Universitetet i Linköping, 1996
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| Emner | |
| ISBN | 9178718090
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