Mechanics of microelectromechanical systems

Nicolae Lobontiu, Ephrahim Garcia
Bok · Engelsk · 2005

Utgitt	New York : Kluwer Academic , c2005
Omfang	XI, 405 s. : ill.
Emner	Microelectromechanical systems mikroteknologi mems mikrosystemer mikroelektronikk
ISBN	1402080131