Handbook of advanced plasma processing techniques
R.J. Shul, S.J. Pearton (eds.)
Bok Engelsk 2000
| Utgitt | Berlin : Springer , c2000
|
|---|---|
| Omfang | XVI, 653 s. : ill.
|
| Emner | Electronic circuits - Design and construction
Plasma engineering Plasma etching Plasma spraying etching semiconductors reactions plasmaprosessering |
| Dewey | |
| ISBN | 3540667725
|
