Growth of single- and polycrystalline titanium nitride by reactive sputtering
Lars Hultman
Bok Engelsk 1986
| Utgitt | Linköping : Linköping University, Department of Physics and Measurement Technology , 1986
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| Omfang | 10, [11] s. : ill.
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| Opplysninger | Avhandling (doktorgrad) - Universitetet i Linköping, 1986.
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| Emner | |
| ISBN | 9178701198
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