Formation and characterization of titanium nitride and titanium carbide films prepared by reactive sputtering
by Jan-Eric Sundgren
Bok Engelsk 1982
Utgitt | Linköping : Department of Physics and Measurement Technology, Linköping Institute of Technology , 1982
|
---|---|
Omfang | 198 s. : fig., tab., diagr.
|
Opplysninger | Har bibliografi.. - Diss. Univ. i Linköping.
|
Emner | |
ISBN | 9173725315
|