A critical evaluation of low energy electron impact cross sections for plasma processing modeling: I, Cl₂, F₂, and HCl. - II, CF₄, SiH₄, and CH₄
by W. Lowell Morgan
Bok Engelsk 1991 · Tabeller
| Utgitt | Boulder, Colo. : University of Colorado ; National Institute of Standards and Technology , 1991
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| Omfang | [91] s. : diagr.
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| Emner | |
| Sjanger |
