Polymers in microlitography : materials and processes
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor
Bok Engelsk 1989
| Annen tittel | |
|---|---|
| Utgitt | Washington, DC : American Chemical Society , 1989
|
| Omfang | xii, 449 s. : ill.
|
| Opplysninger | "Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th National Meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989"
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| Emner | |
| ISBN | 0-08-100358-7
|
