Structure and properties of TiN thin films and TiN/VN superlattices prepared by reactive sputtering
Ulf Helmersson
Bok Engelsk 1986
Utgitt | Linköping : Department of Physics and Measurement Technology, Linköping University , 1986
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Omfang | 1 b. (flere pag.) : ill.
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Opplysninger | Avh. (doktorgrad) - Universitetet i Linköping, 1986.
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Emner | |
ISBN | 9178701163
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