Fundamental aspects of ultrathin dielectrics on Si-based devices
edited by Eric Garfunkel, Evgeni Gusev and Alexander Vul'
Bok Engelsk 1998 NATO Advanced Research Workshop on Fundamental Aspects ofUltrathin Dielectrics on Si-Based Devices : Towards an AtomicScale Understanding
| Utgitt | Dordrecht : Kluwer , c1998
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| Omfang | X, 507 s. : ill.
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| Opplysninger | "Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices : Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997" - Tittelbladets bakside
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| Emner | Dielectric films - Congresses
Silicon-on-insulator technology - Congresses Dielektrika : (NO-TrBIB)REAL004386 Komponenter dielektriske filmer komponenter |
| ISBN | 0792350073
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