3C-SiC epitaxial films deposited by reactive magnetron sputtering : growth, characterization and device development
Qamar ul Wahab
Bok Engelsk 1994
| Utgitt | Linköping : Department of Physics and Measurement Technology, Linköping University , 1994
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|---|---|
| Omfang | 157 s. : ill.
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| Opplysninger | Avh. (tekn. dr.) - Tekniska högskolan i Linköping, 1994
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| Emner | |
| ISBN | 9178714435
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