Ion implantation in semiconductors : proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects, May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany
edited by I. Ruge and J. Graul
Bok Engelsk 1971 International Conference on Ion Implantation in Semiconductors
| Utgitt | Berlin : Springer , 1971
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|---|---|
| Omfang | 506 s. : ill.
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| Emner | |
| ISBN | 0387056661. - 3540056661
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