Microelectronics processing : inorganic materials characterization


Lawrence A. Casper, editor
Bok Engelsk 1986
Utgitt
Washington, D.C. : American Chemical Society , 1986
Omfang
x, 443 s. : ill.
Opplysninger
"Developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society."
Emner
ISBN
0841209340

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