Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies
edited by M. Gentili, C. Giovannella and S. Selci
Bok Engelsk 1994 EB NATO Advanced Research Workshop on Nanolithography : a Borderland Between STM
| Utgitt | Dordrecht : Kluwer Academic Publishers , c1994
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| Omfang | XII, 215 s. : ill.
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| Opplysninger | "Proceedings of the NATO Advanced Research Workshop on Nanolithography: a Borderland Between STM, EB, IB, and X-Ray Lithographies, Frascati, Roma, Italy, April 6-8, 1993" - Tittelsidens bakside
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| Emner | Integrated circuits - Design and construction Congresses
Microlithography - Congresses Molecular electronics - Congresses Nanotechnology - Congresses Vis mer... Elektronikk
Mikroelektronikk Nanoteknologi Tynnfilm - Produksjon Tynnfilmteknikk elektronikk mikroelektronikk litografi nanolitografi nanoteknologi |
| ISBN | 0792327942
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