An investigation of micro structures, sensors, actuators, machines and systems : proceedings


the Ninth Annual International Workshop on Micro Electro Mechanical Systems ; sponsored by the IEEE Robotics and Automation Society ; San Diego, California, USA, February 11-15, 1996
Bok Engelsk 1996
Utgitt
Piscataway, NJ : Institute of Electrical and Electronics Engineers , c1996
Omfang
XXIV, 528 s. : ill.
Opplysninger
"IEEE.". - Rygg- og omslagstittel: 1996 IEEE micro electro mechanical systems
Emner
ISBN
0780329856. - 0780329864. - 0780329872

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