15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 : October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy /

IEEE Electron Devices Society.
Bok · Engelsk IEEE International Conference on Advanced Thermal Processing of Semiconductors

Annen tittel	2007 15th International Conference on Advanced Thermal Processing of Semiconductors . - Computer and Automation Engineering
Utgitt	IEEE
Emner	Rapid thermal processing Semiconductor doping Semiconductors - Defects Semiconductors - Heat treatment
Dewey	621.3815/2
ISBN	1-5090-8215-8