Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California
Kevin M. Monahan, editor
Bok Engelsk 1994
| Annen tittel | |
|---|---|
| Utgitt | Bellingham, Wash. : SPIE Optical Engineering Press , c1994
|
| Omfang | X, 358 s. : ill.
|
| Emner | |
| ISBN | 0819413631
|
