Rapid isothermal processing : 12-13 October 1989, Santa Clara, California
Rajendra Singh, chair/editor ; sponsored by SPIE - the International Society for Optical Engneering ; cooperating organizations: Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH
Bok Engelsk 1990
| Utgitt | Bellingham, Wash. , c1990
|
|---|---|
| Omfang | vi, 204 s. : ill.
|
| ISBN | 0819402257
|
