Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California
· Robert D. Allen, chair/editor ; sponsored and published by SPIE - the International Society for Optical Engineering ; cooperating organization, SEMI - Semiconductor Equipment and Materials International
Bok Engelsk 1995
| Utgitt | Bellingham, Wash. : SPIE , c1995
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|---|---|
| Omfang | XIII, 904 s. : ill.
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| ISBN | 0819417866
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