Proceedings of the Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing : [contains papers presented at the First Symposium on Control, Diagnostics, and Modeling in Semiconductor Manufacturing ..., part of the 187th Meeting of the Electrochemical Society held in Reno, Nevada, during May 21-26, 1995]
Dielectric Science and Technology and Electronics Divisions. Organizers/ed.: M. Meyyappan ...
Bok Språk ikke angitt 1995
| Utgitt | Pennington, NJ : Electrochemical Society , 1995
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| Omfang | X, 630 S
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| Emner | |
| ISBN | 1566770963
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