Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control : [papers presented at the USA-JAPAN joint Symposium on Highly Selective Dry Etching and Damage Control, held in Honolulu, HI, May 19-21, 1993]
Dielectric Science and Technology and Electronics Divisions. Ed. by G.S. Mathad, Y. Horiike
Bok Engelsk 1993 Symposium on Highly Selective Dry Etching and Damage Control
| Utgitt | Pennington, NJ : Electrochemical Society , 1993
|
|---|---|
| Omfang | x, 438 p : ill
|
| Emner | |
| Dewey | |
| ISBN | 1566770661
|
