Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I : [held October 12 - 14, 1992 in Toronto, Ontario, Canada]
Electronics and Dielectric Science and Technology Divisions, the Electrochemical Society. Ed. by Dennis N. Schmidt
Bok Engelsk 1992 Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing
| Annen tittel | |
|---|---|
| Utgitt | Pennington, NJ : Electrochemical Society , 1992
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| Omfang | x, 501 p : ill
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| Opplysninger | Includes bibliographical references and indexes
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| Dewey | |
| ISBN | 156677022X
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