Handbook of semiconductor manufacturing technology
edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige
Bok Engelsk 2000
| Utgitt | New York : Marcel Dekker , c2000
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|---|---|
| Omfang | XIV, 1157 s. : ill.
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| Opplysninger | Includes bibliographical references and index.
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| Emner | |
| ISBN | 0824787838
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| ISBN(galt) |
