Reactive sputter deposition process of Al₂O₃ and characterization of a novel high plasma density pulsed magnetron discharge
Karol Macák
Bok Engelsk 1999
| Utgitt | Linköping : Thin Film Physics Division, Department of Physics and Measurement Technology, Linköpings universitet , 1999
|
|---|---|
| Omfang | 69, [77] s. : ill.
|
| Opplysninger | Avhandling (fil. dr.) - Linköpings tekniska högskola, 1999
|
| Emner | |
| ISBN | 9172196130
|
