Characterization in silicon processing
editor, Yale Strusser ; contributing editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick
Bok Engelsk 1993
| Utgitt | Boston : Butterworth-Heinemann , c1993
|
|---|---|
| Omfang | XIII, 240 s. : ill.
|
| Emner | Electric conductors
Semiconductor films Silicon Surface chemistry Vis mer... Epitaksi
Krystallisering Silisium Tynnfilmer silisium krystallvekst epitaksi tynne filmer karakterisering |
| ISBN | 0750691727
|
