Epitaxial growth of 3C-SiC films on Si substrates by reactive magnetron sputtering and devices made on these films
Qamar ul Wahab
Bok Engelsk 1993
| Utgitt | Linköping : Linköping University, Department of Physics and Measurement Technology , 1993
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|---|---|
| Omfang | 58 bl. : ill.
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| Emner | |
| ISBN | 9178710642
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