Formation and characterization of titanium nitride and titanium carbide films prepared by reactive sputtering
by Jan-Eric Sundgren
Bok Engelsk 1982
| Utgitt | Linköping : Department of Physics and Measurement Technology, Linköping Institute of Technology , 1982
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|---|---|
| Omfang | 198 s. : fig., tab., diagr.
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| Opplysninger | Har bibliografi.. - Diss. Univ. i Linköping.
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| Emner | |
| ISBN | 9173725315
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