Reduced thermal processing for ULSI
edited by Roland A. Levy
Bok Engelsk 1989 NATO Advanced Study Institute on Reduced Thermal Processing for ULSI
| Utgitt | New York : Plenum Press , c1989
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| Omfang | xi, 438 s. : ill.
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| Opplysninger | "Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20-July 1, 1988, in Boca Raton, Florida" - Tittelsidens bakside.
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| Emner | |
| ISBN | 0306433826
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