Structure and properties of titanium- and hafnium-nitride films prepared by reactive magnetron sputtering
by Bengt Olof Johansson
Bok Engelsk 1984
| Utgitt | Linköping : Department of Physics and Measurement Technology, Linköping University , 1984
|
|---|---|
| Omfang | 176 s. : ill.
|
| Opplysninger | Avhandling (doktorgrad) - Universitetet i Linköping, 1984.
|
| Emner | |
| ISBN | 9173728624
|
