Plasma-surface interactions and processing of materials
edited by Orlando Auciello ... [et al.]
Bok Engelsk 1990 NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials
| Utgitt | Dordrecht : Kluwer Academic Publishers , c1990
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| Omfang | xiii, 557 s. : ill.
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| Opplysninger | "Proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials, Alicante, Spain, September 4-16, 1988" - Tittelsidens bakside
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| Emner | Materials - Effect of radiation on Congresses
Materials - Surfaces Congresses Microelectronics - Materials Effect of radiation on Congresses Plasma etching - Congresses Vis mer... Elektronikk : (NO-TrBIB)REAL000162
Materialer Mikroelektronikk Overflatefysikk Overflatekjemi Overflater Plasmafysikk Tynnfilmer materialer plasmafysikk overflater tynne filmer mikroelektronikk |
| ISBN | 0792305841
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