ASMC 95 proceedings
IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop, November 13-15, 1995, Cambridge, Massachusetts
Bok Engelsk 1995 IEEE/SEMI Advanced Semiconductor Manufacturing Conferenceand Workshop
| Utgitt | Mountain View, CA : Semiconductor Equipment and Materials International , c1995
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|---|---|
| Omfang | VI, 391 s. : ill.
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| Opplysninger | "Theme: Semiconductor manufacturing: economic solutions for the 21st century
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| Emner | |
| ISBN | 0780327136. - 0780327144. - 0780327152
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