Growth, microstructure and mechanical properties of Ti and TiN thin films, and TiN-based superlattices
Henrik Ljungcrantz
Bok Engelsk 1995
| Utgitt | Linköping : Thin Film Physics Division, Department of Physics and Measurement Technology, Linköping University , 1995
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| Omfang | 162 s. : ill.
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| Opplysninger | Avhandling (doktorgrad) - Universitetet i Linköping, 1995.
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| Emner | |
| ISBN | 9178716306
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