Modelling of microfabrication systems

Raja Nassar, Weizhong Dai
Bok · Engelsk · 2003

Utgitt	Berlin : Springer , c2003
Omfang	X, 269 s. : ill.
Emner	Integrated circuits - Mathematical models Microelectromechanical systems - Mathematical models Microelectronics - Mathematical models MEMS
ISBN	3540002529