Ion implantation, sputtering and their applications

by P.D. Townsend, J.C. Kelly, N.E.W. Hartley
Bok · Engelsk · 1976 P. D. Townsend

Utgitt	London : Academic Press , 1976
Omfang	IX, 333 s. : ill.
Emner	Ion implantation Sputtering (Physics)
ISBN	0126969507