Ultraclean surface processing of silicon wafers : secrets of VLSI in manufacturing

Takeshi Hattori (ed.)
Bok · Engelsk · 1998

Utgitt	Berlin ; New York : Springer , c1998
Omfang	XXVIII, 616 s. : ill.
Emner	Semiconductor wafers - Cleaning Silicon - Surfaces Surface preparation
ISBN	3540616721