Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21-22 January 2008, San Jose, California, USA
Allyson L. Hartzell , Rajeshuni Ramesham, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University ; published by SPIE
Bok Engelsk 2008
| Utgitt | Bellingham, Wash. : SPIE , c2008
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|---|---|
| Omfang | Div. pag. : ill.
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| Emner | |
| ISBN | 9780819470591
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