VLSI electronics : microstructure science. 6. Materials and process characterization

edited by Norman G. Einspruch, Graydon B. Larrabee
Bok · Engelsk · 1983

Utgitt	New York : Academic Press , 1983
Omfang	xii,598 s.
Emner	Integrerte kretser VLSI : (NO-TrBIB)REAL008829 Very large scale integration integrerte-kretser vlsi
ISBN	0122341066